| |
Previous
EPD System |
Modified
EPD System |
| EOP
Error |
100 % |
90% Reduction |
| Time
out Error |
100 % |
85% Reduction |
| Communication
Error
|
100 % |
80% Reduction |
| CPU Board
Error |
100 % |
Completyly resolved |
| Power
Supply Error
|
100 % |
Completyly resolved |
| HDD
Error |
100 % |
Completyly resolved |
◆ EPD System Modification suggestions
- Maintenance
& Repairs : Shorten the response time fo engineers.
(Maximize maintenance rate of progress & stability)
Improved
the quality of producing Wafers.
- Productivity
: improve the current 30%~40% productivity
- Cost : Minimized
modification costs relattive to capacity
※
Applicable equipment : Semi-conductor & LCD Dry ETCH
|
